2/5/2011	8:28:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2011	8:28:44 AM	Recipe started at 8:28 AM
2/5/2011	8:28:44 AM	H2 valve closed
2/5/2011	8:28:44 AM	BCl3 valve closed
2/5/2011	8:28:44 AM	PH3 valve closed
2/5/2011	8:28:44 AM	SiCl4 pre valve closed
2/5/2011	8:28:44 AM	SiCl4 post valve closed
2/5/2011	8:28:44 AM	Main Vac valve closed
2/5/2011	8:28:44 AM	Bypass valve closed
2/5/2011	8:28:44 AM	Bubbler valve closed
2/5/2011	8:28:44 AM	Helium valve opened
2/5/2011	8:28:44 AM	Helium MFC set to  500.000000
2/5/2011	8:28:44 AM	H2 MFC set to  0.000000
2/5/2011	8:28:44 AM	BCl3 MFC set to  0.000000
2/5/2011	8:28:44 AM	PHl3 MFC set to  0.000000
2/5/2011	8:28:44 AM	SiCl4 MFC set to  0.000000
2/5/2011	8:28:44 AM	Bypass solenoid MFC set to  0.000000
2/5/2011	8:28:45 AM	Tube furnace set to 0
2/5/2011	8:30:05 AM	Helium valve closed
2/5/2011	8:30:05 AM	H2 valve closed
2/5/2011	8:30:05 AM	BCl3 valve closed
2/5/2011	8:30:05 AM	PH3 valve closed
2/5/2011	8:30:05 AM	SiCl4 pre valve closed
2/5/2011	8:30:05 AM	SiCl4 post valve closed
2/5/2011	8:30:05 AM	Main Vac valve closed
2/5/2011	8:30:05 AM	Bypass valve closed
2/5/2011	8:30:05 AM	Bubbler valve closed
2/5/2011	8:30:05 AM	Helium MFC set to  0.000000
2/5/2011	8:30:05 AM	H2 MFC set to  0.000000
2/5/2011	8:30:05 AM	BCl3 MFC set to  0.000000
2/5/2011	8:30:05 AM	PHl3 MFC set to  0.000000
2/5/2011	8:30:05 AM	SiCl4 MFC set to  0.000000
2/5/2011	8:30:05 AM	Bypass solenoid MFC set to  0.000000
2/5/2011	8:30:06 AM	Tube furnace set to 0
2/5/2011	8:30:06 AM	Run finished at 8:30 AM
2/5/2011	8:30:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2011	8:35:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2011	8:35:40 AM	Recipe started at 8:35 AM
2/5/2011	8:35:40 AM	Helium valve closed
2/5/2011	8:35:40 AM	H2 valve closed
2/5/2011	8:35:40 AM	BCl3 valve closed
2/5/2011	8:35:40 AM	PH3 valve closed
2/5/2011	8:35:40 AM	SiCl4 pre valve closed
2/5/2011	8:35:40 AM	SiCl4 post valve closed
2/5/2011	8:35:40 AM	Main Vac valve closed
2/5/2011	8:35:40 AM	Bubbler valve closed
2/5/2011	8:35:40 AM	Bypass valve opened
2/5/2011	8:35:40 AM	Helium MFC set to  0.000000
2/5/2011	8:35:40 AM	H2 MFC set to  0.000000
2/5/2011	8:35:40 AM	BCl3 MFC set to  0.000000
2/5/2011	8:35:40 AM	PHl3 MFC set to  0.000000
2/5/2011	8:35:40 AM	SiCl4 MFC set to  0.000000
2/5/2011	8:35:40 AM	Bypass solenoid MFC set to  0.000000
2/5/2011	8:35:40 AM	Tube furnace set to 0
2/5/2011	8:36:11 AM	Helium valve closed
2/5/2011	8:36:11 AM	H2 valve closed
2/5/2011	8:36:11 AM	BCl3 valve closed
2/5/2011	8:36:11 AM	PH3 valve closed
2/5/2011	8:36:11 AM	SiCl4 pre valve closed
2/5/2011	8:36:11 AM	SiCl4 post valve closed
2/5/2011	8:36:11 AM	Bubbler valve closed
2/5/2011	8:36:11 AM	Main Vac valve opened
2/5/2011	8:36:11 AM	Bypass valve opened
2/5/2011	8:36:11 AM	Helium MFC set to  0.000000
2/5/2011	8:36:11 AM	H2 MFC set to  0.000000
2/5/2011	8:36:11 AM	BCl3 MFC set to  0.000000
2/5/2011	8:36:11 AM	PHl3 MFC set to  0.000000
2/5/2011	8:36:11 AM	SiCl4 MFC set to  0.000000
2/5/2011	8:36:11 AM	Bypass solenoid MFC set to  0.000000
2/5/2011	8:36:11 AM	Tube furnace set to 0
2/5/2011	8:36:12 AM	Run finished at 8:36 AM
2/5/2011	8:36:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2011	1:05:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/5/2011	1:05:43 PM	Recipe started at 1:05 PM
2/5/2011	1:05:43 PM	Helium valve closed
2/5/2011	1:05:43 PM	H2 valve closed
2/5/2011	1:05:43 PM	BCl3 valve closed
2/5/2011	1:05:43 PM	PH3 valve closed
2/5/2011	1:05:43 PM	SiCl4 pre valve closed
2/5/2011	1:05:43 PM	SiCl4 post valve closed
2/5/2011	1:05:43 PM	Main Vac valve closed
2/5/2011	1:05:43 PM	Bypass valve closed
2/5/2011	1:05:43 PM	Bubbler valve closed
2/5/2011	1:05:43 PM	Helium MFC set to  0.000000
2/5/2011	1:05:43 PM	H2 MFC set to  0.000000
2/5/2011	1:05:43 PM	BCl3 MFC set to  0.000000
2/5/2011	1:05:43 PM	PHl3 MFC set to  0.000000
2/5/2011	1:05:43 PM	SiCl4 MFC set to  0.000000
2/5/2011	1:05:43 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	1:05:43 PM	Tube furnace set to 0
2/5/2011	1:05:43 PM	Run finished at 1:05 PM
2/5/2011	1:05:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/5/2011	1:06:06 PM	Recipe started at 1:06 PM
2/5/2011	1:06:06 PM	Helium valve closed
2/5/2011	1:06:06 PM	BCl3 valve closed
2/5/2011	1:06:06 PM	PH3 valve closed
2/5/2011	1:06:06 PM	SiCl4 pre valve closed
2/5/2011	1:06:06 PM	SiCl4 post valve closed
2/5/2011	1:06:06 PM	Main Vac valve closed
2/5/2011	1:06:06 PM	Bypass valve closed
2/5/2011	1:06:06 PM	Bubbler valve closed
2/5/2011	1:06:06 PM	H2 valve opened
2/5/2011	1:06:06 PM	Helium MFC set to  0.000000
2/5/2011	1:06:06 PM	H2 MFC set to  500.000000
2/5/2011	1:06:06 PM	BCl3 MFC set to  0.000000
2/5/2011	1:06:06 PM	PHl3 MFC set to  0.000000
2/5/2011	1:06:06 PM	SiCl4 MFC set to  0.000000
2/5/2011	1:06:06 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	1:06:06 PM	Tube furnace set to 0
2/5/2011	1:07:27 PM	Helium valve closed
2/5/2011	1:07:27 PM	BCl3 valve closed
2/5/2011	1:07:27 PM	PH3 valve closed
2/5/2011	1:07:27 PM	SiCl4 pre valve closed
2/5/2011	1:07:27 PM	SiCl4 post valve closed
2/5/2011	1:07:27 PM	Main Vac valve closed
2/5/2011	1:07:27 PM	Bypass valve closed
2/5/2011	1:07:27 PM	H2 valve opened
2/5/2011	1:07:27 PM	Bubbler valve opened
2/5/2011	1:07:27 PM	Helium MFC set to  0.000000
2/5/2011	1:07:27 PM	H2 MFC set to  500.000000
2/5/2011	1:07:27 PM	BCl3 MFC set to  0.000000
2/5/2011	1:07:27 PM	PHl3 MFC set to  0.000000
2/5/2011	1:07:27 PM	SiCl4 MFC set to  0.000000
2/5/2011	1:07:27 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	1:07:27 PM	Tube furnace set to 1000
2/5/2011	1:07:27 PM	Helium valve closed
2/5/2011	1:07:27 PM	H2 valve closed
2/5/2011	1:07:27 PM	BCl3 valve closed
2/5/2011	1:07:27 PM	PH3 valve closed
2/5/2011	1:07:27 PM	SiCl4 pre valve closed
2/5/2011	1:07:27 PM	SiCl4 post valve closed
2/5/2011	1:07:27 PM	Main Vac valve closed
2/5/2011	1:07:27 PM	Bubbler valve closed
2/5/2011	1:07:27 PM	Bypass valve closed
2/5/2011	1:07:27 PM	Helium MFC set to  0.000000
2/5/2011	1:07:27 PM	H2 MFC set to  0.000000
2/5/2011	1:07:27 PM	BCl3 MFC set to  0.000000
2/5/2011	1:07:27 PM	PHl3 MFC set to  0.000000
2/5/2011	1:07:27 PM	SiCl4 MFC set to  0.000000
2/5/2011	1:07:27 PM	Bypass solenoid MFC set to  760.000000
2/5/2011	1:07:27 PM	Tube furnace set to 0
2/5/2011	1:07:28 PM	Baratron reads 746.422461 Torr and NaOH valve is open.  Emergency exit.
2/5/2011	1:10:14 PM	Run aborted at 1:10 PM
2/5/2011	1:10:21 PM	Recipe started at 1:10 PM
2/5/2011	1:10:21 PM	Helium valve closed
2/5/2011	1:10:21 PM	BCl3 valve closed
2/5/2011	1:10:21 PM	PH3 valve closed
2/5/2011	1:10:21 PM	SiCl4 pre valve closed
2/5/2011	1:10:21 PM	SiCl4 post valve closed
2/5/2011	1:10:21 PM	Main Vac valve closed
2/5/2011	1:10:21 PM	Bypass valve closed
2/5/2011	1:10:21 PM	Bubbler valve closed
2/5/2011	1:10:21 PM	H2 valve opened
2/5/2011	1:10:21 PM	Helium MFC set to  0.000000
2/5/2011	1:10:21 PM	H2 MFC set to  500.000000
2/5/2011	1:10:21 PM	BCl3 MFC set to  0.000000
2/5/2011	1:10:21 PM	PHl3 MFC set to  0.000000
2/5/2011	1:10:21 PM	SiCl4 MFC set to  0.000000
2/5/2011	1:10:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	1:10:21 PM	Tube furnace set to 0
2/5/2011	1:10:24 PM	Helium valve closed
2/5/2011	1:10:24 PM	BCl3 valve closed
2/5/2011	1:10:24 PM	PH3 valve closed
2/5/2011	1:10:24 PM	SiCl4 pre valve closed
2/5/2011	1:10:24 PM	SiCl4 post valve closed
2/5/2011	1:10:24 PM	Main Vac valve closed
2/5/2011	1:10:24 PM	Bypass valve closed
2/5/2011	1:10:24 PM	H2 valve opened
2/5/2011	1:10:24 PM	Bubbler valve opened
2/5/2011	1:10:24 PM	Helium MFC set to  0.000000
2/5/2011	1:10:24 PM	H2 MFC set to  500.000000
2/5/2011	1:10:24 PM	BCl3 MFC set to  0.000000
2/5/2011	1:10:24 PM	PHl3 MFC set to  0.000000
2/5/2011	1:10:24 PM	SiCl4 MFC set to  0.000000
2/5/2011	1:10:24 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	1:10:25 PM	Tube furnace set to 1000
2/5/2011	1:30:25 PM	Helium valve closed
2/5/2011	1:30:25 PM	PH3 valve closed
2/5/2011	1:30:25 PM	Main Vac valve closed
2/5/2011	1:30:25 PM	Bypass valve closed
2/5/2011	1:30:25 PM	H2 valve opened
2/5/2011	1:30:25 PM	BCl3 valve opened
2/5/2011	1:30:25 PM	SiCl4 pre valve opened
2/5/2011	1:30:25 PM	SiCl4 post valve opened
2/5/2011	1:30:25 PM	Bubbler valve opened
2/5/2011	1:30:25 PM	Helium MFC set to  0.000000
2/5/2011	1:30:25 PM	H2 MFC set to  500.000000
2/5/2011	1:30:25 PM	BCl3 MFC set to  3.000000
2/5/2011	1:30:25 PM	PHl3 MFC set to  0.000000
2/5/2011	1:30:25 PM	SiCl4 MFC set to  50.000000
2/5/2011	1:30:25 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	1:30:25 PM	Tube furnace set to 1000
2/5/2011	1:45:25 PM	H2 valve closed
2/5/2011	1:45:25 PM	BCl3 valve closed
2/5/2011	1:45:25 PM	PH3 valve closed
2/5/2011	1:45:25 PM	SiCl4 pre valve closed
2/5/2011	1:45:25 PM	SiCl4 post valve closed
2/5/2011	1:45:25 PM	Main Vac valve closed
2/5/2011	1:45:25 PM	Bypass valve closed
2/5/2011	1:45:25 PM	Helium valve opened
2/5/2011	1:45:25 PM	Bubbler valve opened
2/5/2011	1:45:25 PM	Helium MFC set to  500.000000
2/5/2011	1:45:25 PM	H2 MFC set to  0.000000
2/5/2011	1:45:25 PM	BCl3 MFC set to  0.000000
2/5/2011	1:45:25 PM	PHl3 MFC set to  0.000000
2/5/2011	1:45:25 PM	SiCl4 MFC set to  0.000000
2/5/2011	1:45:25 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	1:45:25 PM	Tube furnace set to 0
2/5/2011	2:05:25 PM	Helium valve closed
2/5/2011	2:05:25 PM	H2 valve closed
2/5/2011	2:05:25 PM	BCl3 valve closed
2/5/2011	2:05:25 PM	PH3 valve closed
2/5/2011	2:05:25 PM	SiCl4 pre valve closed
2/5/2011	2:05:25 PM	SiCl4 post valve closed
2/5/2011	2:05:25 PM	Main Vac valve closed
2/5/2011	2:05:25 PM	Bypass valve closed
2/5/2011	2:05:25 PM	Bubbler valve closed
2/5/2011	2:05:25 PM	Helium MFC set to  0.000000
2/5/2011	2:05:25 PM	H2 MFC set to  0.000000
2/5/2011	2:05:25 PM	BCl3 MFC set to  0.000000
2/5/2011	2:05:25 PM	PHl3 MFC set to  0.000000
2/5/2011	2:05:25 PM	SiCl4 MFC set to  0.000000
2/5/2011	2:05:25 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	2:05:25 PM	Tube furnace set to 0
2/5/2011	2:05:25 PM	Run finished at 2:05 PM
2/5/2011	2:10:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2011	2:10:27 PM	Recipe started at 2:10 PM
2/5/2011	2:10:27 PM	H2 valve closed
2/5/2011	2:10:27 PM	BCl3 valve closed
2/5/2011	2:10:27 PM	PH3 valve closed
2/5/2011	2:10:27 PM	SiCl4 pre valve closed
2/5/2011	2:10:27 PM	SiCl4 post valve closed
2/5/2011	2:10:27 PM	Main Vac valve closed
2/5/2011	2:10:27 PM	Bypass valve closed
2/5/2011	2:10:27 PM	Bubbler valve closed
2/5/2011	2:10:27 PM	Helium valve opened
2/5/2011	2:10:27 PM	Helium MFC set to  500.000000
2/5/2011	2:10:27 PM	H2 MFC set to  0.000000
2/5/2011	2:10:27 PM	BCl3 MFC set to  0.000000
2/5/2011	2:10:27 PM	PHl3 MFC set to  0.000000
2/5/2011	2:10:27 PM	SiCl4 MFC set to  0.000000
2/5/2011	2:10:27 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	2:10:27 PM	Tube furnace set to 0
2/5/2011	2:10:29 PM	Helium valve closed
2/5/2011	2:10:29 PM	H2 valve closed
2/5/2011	2:10:29 PM	BCl3 valve closed
2/5/2011	2:10:29 PM	PH3 valve closed
2/5/2011	2:10:29 PM	SiCl4 pre valve closed
2/5/2011	2:10:29 PM	SiCl4 post valve closed
2/5/2011	2:10:29 PM	Main Vac valve closed
2/5/2011	2:10:29 PM	Bypass valve closed
2/5/2011	2:10:29 PM	Bubbler valve closed
2/5/2011	2:10:29 PM	Helium MFC set to  0.000000
2/5/2011	2:10:29 PM	H2 MFC set to  0.000000
2/5/2011	2:10:29 PM	BCl3 MFC set to  0.000000
2/5/2011	2:10:29 PM	PHl3 MFC set to  0.000000
2/5/2011	2:10:29 PM	SiCl4 MFC set to  0.000000
2/5/2011	2:10:29 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	2:10:29 PM	Tube furnace set to 0
2/5/2011	2:10:29 PM	Run finished at 2:10 PM
2/5/2011	2:10:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2011	2:16:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2011	2:16:39 PM	Recipe started at 2:16 PM
2/5/2011	2:16:39 PM	Helium valve closed
2/5/2011	2:16:39 PM	H2 valve closed
2/5/2011	2:16:39 PM	BCl3 valve closed
2/5/2011	2:16:39 PM	PH3 valve closed
2/5/2011	2:16:39 PM	SiCl4 pre valve closed
2/5/2011	2:16:39 PM	SiCl4 post valve closed
2/5/2011	2:16:39 PM	Main Vac valve closed
2/5/2011	2:16:39 PM	Bubbler valve closed
2/5/2011	2:16:39 PM	Bypass valve opened
2/5/2011	2:16:39 PM	Helium MFC set to  0.000000
2/5/2011	2:16:39 PM	H2 MFC set to  0.000000
2/5/2011	2:16:39 PM	BCl3 MFC set to  0.000000
2/5/2011	2:16:39 PM	PHl3 MFC set to  0.000000
2/5/2011	2:16:39 PM	SiCl4 MFC set to  0.000000
2/5/2011	2:16:39 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	2:16:40 PM	Tube furnace set to 0
2/5/2011	2:17:11 PM	Helium valve closed
2/5/2011	2:17:11 PM	H2 valve closed
2/5/2011	2:17:11 PM	BCl3 valve closed
2/5/2011	2:17:11 PM	PH3 valve closed
2/5/2011	2:17:11 PM	SiCl4 pre valve closed
2/5/2011	2:17:11 PM	SiCl4 post valve closed
2/5/2011	2:17:11 PM	Bubbler valve closed
2/5/2011	2:17:11 PM	Main Vac valve opened
2/5/2011	2:17:11 PM	Bypass valve opened
2/5/2011	2:17:11 PM	Helium MFC set to  0.000000
2/5/2011	2:17:11 PM	H2 MFC set to  0.000000
2/5/2011	2:17:11 PM	BCl3 MFC set to  0.000000
2/5/2011	2:17:11 PM	PHl3 MFC set to  0.000000
2/5/2011	2:17:11 PM	SiCl4 MFC set to  0.000000
2/5/2011	2:17:11 PM	Bypass solenoid MFC set to  0.000000
2/5/2011	2:17:11 PM	Tube furnace set to 0
2/5/2011	2:17:11 PM	Run finished at 2:17 PM
2/5/2011	2:17:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
